Sustained Radio Frequency High Voltage Discharges

Radio Frequency-micro Electromechanical System Switch with High Speed and Low Actuated Voltage

This paper presents a novel RF MEMS (Micro Electromechanical System) fixed-fixed switch for very fast switching. Using the obtained equations, the switching time depends on the stiffness and effective mass of the switch beam so that the switching time will be decreased by higher stiffness (spring constant) and lower effective mass. In new design, the suspension bridge is a three-layer beam so t...

Breakdown behavior in radio-frequency argon discharges

Electrical characterization of radio frequency discharges

Two electrical techniques that are frequently used to characterize radio frequency plasmas are described: current–voltage probes for plasma power input and compensated Langmuir probes for electron energy probability functions and other parameters. The following examples of the use of these techniques, sometimes in conjunction with other diagnostic methods, are presented: plasma source standardi...

Capacitively-coupled radio-frequency hydrogen discharges: the role of kinetics

This paper presents a systematic characterization of capacitively-coupled radio-frequency hydrogen discharges, produced within a parallel plate cylindrical setup at different rf applied voltages (Vrf = 50− 600 V), frequencies (f = 13.56− 40.56 MHz), and pressures (p = 0.2− 1 torr). A twodimensional, time-dependent fluid model for charged particle transport is self-consistently solved coupled to...

Electronbeam controlled radio frequency discharges for plasma processing

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